Thermal characterization of a microheater for micromachined gas sensors
نویسندگان
چکیده
In this paper, a new four-point probe, double spiral heating element configuration for micromachined gas sensors is proposed and a simple analytical model of the steady-state thermal behavior of the microheater is presented. A testing procedure is suggested, based on simple two-wire and four-wire resistance versus power measurements, together with an iterative extraction procedure for the parameters of the thermal model. This allowed us to accurately extract the sensor active area temperature as a function of the total power dissipated on the microheater. © 2004 Published by Elsevier B.V.
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